Electrical and microstructural properties of N+ ion-implanted ZnO and ZnO:Ag thin films

标题
Electrical and microstructural properties of N+ ion-implanted ZnO and ZnO:Ag thin films
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 3, Pages 03A108
出版商
American Vacuum Society
发表日期
2011-02-15
DOI
10.1116/1.3554836

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