Comparative studies of nonpolar (10-10) ZnO films grown by using atomic layer deposition and radio-frequency magnetron sputtering

标题
Comparative studies of nonpolar (10-10) ZnO films grown by using atomic layer deposition and radio-frequency magnetron sputtering
作者
关键词
ZnO, Sputter, ALD, TCO, LED
出版物
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 65, Issue 3, Pages 417-420
出版商
Korean Physical Society
发表日期
2014-08-19
DOI
10.3938/jkps.65.417

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