Quantitative Calculation of Oxygen Incorporation in Sputtered IGZO Films and the Impact on Transistor Properties

标题
Quantitative Calculation of Oxygen Incorporation in Sputtered IGZO Films and the Impact on Transistor Properties
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 3, Pages H289
出版商
The Electrochemical Society
发表日期
2011-01-15
DOI
10.1149/1.3530779

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