Role of Different Additives on Silicon Dioxide Film Removal Rate during Chemical Mechanical Polishing Using Ceria-Based Dispersions

Valence states of nanocrystalline Ceria under combined effects of hydrogen reduction and particle size

(2010) Xuefei Wan et al.   APPLIED PHYSICS LETTERS

Electronic Conductivity of CeO[sub 2]: Its Dependence on Oxygen Partial Pressure and Temperature

(2010) Yue-Ping Xiong et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Reverse selectivity – High silicon nitride and low silicon dioxide removal rates using ceria abrasive-based dispersions

(2010) P.R. Veera Dandu et al.   JOURNAL OF COLLOID AND INTERFACE SCIENCE

Suppression of Electronic Conductivity of CeO[sub 2]-Based Electrolytes by Electron Traps

(2010) Han-Ill Yoo et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Exploring Ce[sup 3+]/Ce[sup 4+] cation ordering in reduced ceria nanoparticles using interionic-potential and density-functional calculations

(2009) Annapaola Migani et al.   JOURNAL OF CHEMICAL PHYSICS

A Study of Lattice Expansion in CeO2 Nanoparticles by Transmission Electron Microscopy

(2009) R. K. Hailstone et al.   Journal of Physical Chemistry C

Oxygen Vacancy Clusters Promoting Reducibility and Activity of Ceria Nanorods

(2009) Xiangwen Liu et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Selective Polishing of Polysilicon during Fabrication of Microelectromechanical Systems Devices

(2009) P. R. Dandu Veera et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Selective Chemical Mechanical Polishing of Silicon Dioxide over Silicon Nitride for Shallow Trench Isolation Using Ceria Slurries

(2009) P. R. Dandu Veera et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Dopant-mediated oxygen vacancy tuning in ceria nanoparticles

(2009) Suresh Babu et al.   NANOTECHNOLOGY

The effect of hydrogen peroxide on polishing removal rate in CMP with various abrasives

(2008) R. Manivannan et al.   APPLIED SURFACE SCIENCE

Controllable preparation and properties of composite materials based on ceria nanoparticles and carbon nanotubes

(2008) Changqing Li et al.   JOURNAL OF SOLID STATE CHEMISTRY