Selective Chemical Mechanical Polishing of Silicon Dioxide over Silicon Nitride for Shallow Trench Isolation Using Ceria Slurries

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 156, Issue 12, Pages H936

出版商

The Electrochemical Society

发表日期

2009-10-28

DOI

10.1149/1.3230624

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