Charge Density in Atmospheric Pressure Chemical Vapor Deposition TiO[sub 2] on SiO[sub 2]-Passivated Silicon

标题
Charge Density in Atmospheric Pressure Chemical Vapor Deposition TiO[sub 2] on SiO[sub 2]-Passivated Silicon
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 11, Pages G190
出版商
The Electrochemical Society
发表日期
2009-10-06
DOI
10.1149/1.3216029

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