Production of nanohole/nanodot patterns on Si(001) by ion beam sputtering with simultaneous metal incorporation

标题
Production of nanohole/nanodot patterns on Si(001) by ion beam sputtering with simultaneous metal incorporation
作者
关键词
-
出版物
JOURNAL OF PHYSICS-CONDENSED MATTER
Volume 21, Issue 22, Pages 224009
出版商
IOP Publishing
发表日期
2009-05-13
DOI
10.1088/0953-8984/21/22/224009

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