Massively parallel fabrication of repetitive nanostructures: nanolithography for nanoarrays
出版年份 2009 全文链接
标题
Massively parallel fabrication of repetitive nanostructures: nanolithography for nanoarrays
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 12, Pages 123001
出版商
IOP Publishing
发表日期
2009-06-05
DOI
10.1088/0022-3727/42/12/123001
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