Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation

标题
Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation
作者
关键词
-
出版物
JOURNAL OF PHYSICAL CHEMISTRY A
Volume 117, Issue 40, Pages 10211-10217
出版商
American Chemical Society (ACS)
发表日期
2013-10-01
DOI
10.1021/jp406521v

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