Nanoindentation-induced phase transformation in relaxed and unrelaxed ion-implanted amorphous germanium

标题
Nanoindentation-induced phase transformation in relaxed and unrelaxed ion-implanted amorphous germanium
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 9, Pages 093509
出版商
AIP Publishing
发表日期
2009-11-07
DOI
10.1063/1.3255999

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