Article
Computer Science, Information Systems
Xiaomeng Wu, Liangjian Wen, Liqiang Cao, Guofu Cao, Gaosong Li, Yasheng Fu, Zhongyao Yu, Zhidan Fang, Qidong Wang
Summary: A charge detector with high collection rate and low noise was designed using calculation and simulation methods, and the entire manufacturing process was described. A novel through glass via (TGV) structure composed of a conformal metal layer and a photosensitive material that is easy to fabricate and has high morphological compatibility with via filling was proposed. A fully integrated solid-state charge detector with 32 groups of TGVs was realized, and the electrical properties of key structures were tested and analyzed.
Article
Engineering, Electrical & Electronic
Kyojiro Morikawa, Po-yin Chen, Hai Linh Tran, Yutaka Kazoe, Chihchen Chen, Takehiko Kitamori
Summary: Channel fabrication technology is essential for microfluidic and nanofluidic devices. Glass channels are attractive due to their stability, transparency, and ease of modification. This study developed a microchannel fabrication method with high etching selectivity and smooth surface.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
(2023)
Article
Materials Science, Multidisciplinary
David Bischof, Michael Kahl, Markus Michler
Summary: A method for selectively etching borosilicate glass using laser and wet chemical etching was presented in this study. The selectivity was analyzed based on laser parameters, and a high selectivity of up to 540 was observed. Manufacturing capabilities for three-dimensional free form shapes in BF33 were demonstrated and compared with fused silica.
OPTICAL MATERIALS EXPRESS
(2021)
Article
Engineering, Electrical & Electronic
Tingnan Yan, Chao Dong, Jianwei Zhao, Amir Khesro, Zheng Liu, Shikuan Sun, Junjie Li, Rong Sun, Dawei Wang
Summary: Novel lead-free composites based on ABS/FQ were synthesized and their phase structure, sintering behavior, dielectric properties, and thermal expansion coefficient were investigated. The results showed that higher FQ content decreased the density of the composites, while lower FQ content resulted in lower thermal expansion coefficient. The composite with 65 wt% ABS and 35 wt% FQ exhibited the best performance.
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
(2022)
Article
Optics
Youwang Hu, Yalong Wang, Xianshan Dong, Xiang Xi, Chao Long, Haoning Zheng, Yao Wang, Xiaoyan Sun, Ji'an Duan
Summary: With the development of technology, fused silica has been widely used in various industrial fields. This paper proposes a method that combines femtosecond laser modification processing and chemical etching technology to cut fused silica. The processing parameters of femtosecond laser modification are explored, and high-quality cutting of millimeter-thick fused silica is achieved.
Article
Materials Science, Multidisciplinary
Remo N. Widmer, David Bischof, Jakub Jurczyk, Markus Michler, Jakob Schwiedrzik, Johann Michler
Summary: Recent progress in manufacturing now allows for efficient fabrication of complex oxide-glass components at the micrometer- to sub-micrometer scale, benefiting both industry and fundamental research due to numerous applications of miniature glass parts. Research shows that fused silica micro-pillars fabricated by laser-assisted etching are almost ten times stronger than their bulk-sized counterparts.
MATERIALS & DESIGN
(2021)
Article
Engineering, Environmental
Yi Liu, Bingsheng Li, Xiaoyan Shu, Zhentao Zhang, Guilin Wei, Yi Liu, Shunzhang Chen, Yi Xie, Xirui Lu
Summary: In order to immobilize radioactive iodine generated during nuclear energy development, borosilicate glass was sintered using B2O3, Bi2O3, ZnO, and SiO2. The addition of B2O3 significantly affected the glass formation, and increasing iodine loading concentrations resulted in changes in microstructure and phase transformation of the glass.
JOURNAL OF HAZARDOUS MATERIALS
(2021)
Article
Engineering, Electrical & Electronic
Seungmok Lee, Masashi Hasegawa, Kazuhiro Nishizono
Summary: The study shows that SCL has an influence on the etch rate of quartz and BSG, and the etching mechanism depends on the thickness of the SCL. The formation of SCL is affected by both the plasma gas composition and substrate material.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2021)
Article
Multidisciplinary Sciences
Jung Eun Lee, Eunbee Kim, Joung Boon Hwang, Jae Chun Choi, Jong Kwon Lee
Summary: The purpose of this study is to investigate the conditions leading to the formation of flakes in glass containers and to identify the components of the suspended flakes. Results show that flakes are formed under specific temperature, pH, and solution composition conditions. The composition of the flakes was identified as a mixture of hydrates of magnesium, calcium, and aluminum silicate.
Article
Materials Science, Multidisciplinary
Pawel Maniewski, Fredrik Laurell, Michael Fokine
Summary: This study presents the additive manufacturing of high-quality macroscopic fused silica glass structures, achieving high deposition rates and offering broad application potential. By using three co-axial nozzles to avoid the quill effect, homogeneous and crack-free printing was achieved using cluster-free sub-mu m powders and CO2 laser-induced melt pool. Laser post-processing was utilized to enhance surface quality.
OPTICAL MATERIALS EXPRESS
(2022)
Article
Chemistry, Multidisciplinary
Khakimjon Saidov, Ivan Erofeev, Zainul Aabdin, Antoine Pacco, Harold Philipsen, Antony Winata Hartanto, Yifan Chen, Hongwei Yan, Weng Weei Tjiu, Frank Holsteyns, Utkur Mirsaidov
Summary: A method of precise and uniform wet etching for molybdenum (Mo) and other metals is presented, which overcomes the challenge of non-uniform etch profiles in wet chemical etching of polycrystalline metals. This method combines multiple cycles of cryo-oxidation and selective oxide dissolution to achieve the desired smooth and uniform nanostructures.
ADVANCED FUNCTIONAL MATERIALS
(2023)
Article
Engineering, Electrical & Electronic
Changhong Wang, Youhuan Ning, Wenyue Ning, Guoxing Yi, Yan Huo
Summary: This paper proposes a cyclic chemical etching method to improve the surface morphology of hemispherical resonators, significantly improving the Q factor. The developed loss model can screen hemispherical resonators with different performances according to the change of the Q factor during the etching process, which is essential for bulk fabricating high-quality factor hemispherical resonators.
SENSORS AND ACTUATORS A-PHYSICAL
(2023)
Article
Optics
Simon Schwarz, Stefan Rung, Cemal Esen, Ralf Hellmann
Summary: Rectangular microchannels with vertical sidewalls in fused silica are fabricated using femtosecond laser backside ablation, allowing for control of channel depth and width through applied fluence and number of scans, with focal position adjustment enabling extension of channel depth. The flexibility of the direct writing process is demonstrated by ablating concentric rings.
Article
Optics
Yichi Han, Xiaocong Peng, Songlin Wan, Chaoyang Wei, Jianda Shao
Summary: In this article, a three-dimensional multi-physics thermomechanical model was developed to reveal the evolution mechanism of surface morphology and thermal stress formation during laser ablation. The simulated results were validated through experiments. This study contributes to a profound understanding of the laser ablation process and establishes a theoretical foundation for achieving high surface quality and non-thermal stress laser ablation.
Article
Materials Science, Multidisciplinary
Bo Li, Wenfeng Sun, Xia Xiang, Xiaolong Jiang, Wei Liao, Haijun Wang, Xiaodong Yuan, Xiaodong Jiang, Xiaotao Zu
Summary: A two-step physical-chemical etching method using large incident angle ion beam etching followed by HF etching is proposed to remove damage precursors in fused silica surface, resulting in good surface quality and enhanced laser damage resistance. The large incident angle ion beam etching removes metal impurities and subsurface defects, reducing the amount of subsequent HF etching and preventing the replication and expansion of subsurface defects. HF etching is then used to remove atomic-scale damaged layer and improve surface shape. Compared to single etching methods, the two-step etching method achieves better laser damage performance.
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T
(2022)