Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

标题
Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography
作者
关键词
-
出版物
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 12, Issue 3, Pages 031107
出版商
SPIE-Intl Soc Optical Eng
发表日期
2013-08-07
DOI
10.1117/1.jmm.12.3.031107

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