The Influence of Film Thickness on the Transparency and Conductivity of Al-Doped ZnO Thin Films Fabricated by Ion-Beam Sputtering

标题
The Influence of Film Thickness on the Transparency and Conductivity of Al-Doped ZnO Thin Films Fabricated by Ion-Beam Sputtering
作者
关键词
-
出版物
JOURNAL OF ELECTRONIC MATERIALS
Volume 40, Issue 3, Pages 267-273
出版商
Springer Nature
发表日期
2011-01-29
DOI
10.1007/s11664-010-1503-y

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