Structural and compositional characterization of MOVPE GaN thin films transferred from sapphire to glass substrates using chemical lift-off and room temperature direct wafer bonding and GaN wafer scale MOVPE growth on ZnO-buffered sapphire

标题
Structural and compositional characterization of MOVPE GaN thin films transferred from sapphire to glass substrates using chemical lift-off and room temperature direct wafer bonding and GaN wafer scale MOVPE growth on ZnO-buffered sapphire
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 370, Issue -, Pages 63-67
出版商
Elsevier BV
发表日期
2012-09-26
DOI
10.1016/j.jcrysgro.2012.08.048

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