标题
Low-temperature plasma-deposited silicon epitaxial films: Growth and properties
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 116, Issue 5, Pages 053519
出版商
AIP Publishing
发表日期
2014-08-06
DOI
10.1063/1.4892095
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Thin-Film Heterojunction Field-Effect Transistors With Crystalline Si Channels and Low-Temperature PECVD Contacts
- (2014) Bahman Hekmatshoar IEEE ELECTRON DEVICE LETTERS
- Amorphous silicon oxide window layers for high-efficiency silicon heterojunction solar cells
- (2014) Johannes Peter Seif et al. JOURNAL OF APPLIED PHYSICS
- Amorphous/crystalline silicon interface defects induced by hydrogen plasma treatments
- (2013) Jonas Geissbühler et al. APPLIED PHYSICS LETTERS
- Characterization of thin epitaxial emitters for high-efficiency silicon heterojunction solar cells
- (2012) Bahman Hekmatshoar et al. APPLIED PHYSICS LETTERS
- Low temperature plasma deposition of silicon thin films: From amorphous to crystalline
- (2012) P. Roca i Cabarrocas et al. JOURNAL OF NON-CRYSTALLINE SOLIDS
- Low-Temperature Epitaxy of Compressively Strained Silicon Directly on Silicon Substrates
- (2011) D. Shahrjerdi et al. JOURNAL OF ELECTRONIC MATERIALS
- Thin crystalline silicon solar cells based on epitaxial films grown at 165°C by RF-PECVD
- (2011) Romain Cariou et al. SOLAR ENERGY MATERIALS AND SOLAR CELLS
- The silane depletion fraction as an indicator for the amorphous/crystalline silicon interface passivation quality
- (2010) A. Descoeudres et al. APPLIED PHYSICS LETTERS
- Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films
- (2009) R. Bartlome et al. APPLIED PHYSICS LETTERS
- Ultra-shallow junctions formed by quasi-epitaxial growth of boron and phosphorous-doped silicon films at 175°C by rf-PECVD
- (2009) M. Labrune et al. THIN SOLID FILMS
- Surface passivation and heterojunction cells on Si (100) and (111) wafers using dc and rf plasma deposited Si:H thin films
- (2008) U. K. Das et al. APPLIED PHYSICS LETTERS
- Why does the open-circuit voltage in a micro-crystalline silicon PIN solar cell decrease with increasing crystalline volume fraction?
- (2008) E.V. Johnson et al. JOURNAL OF NON-CRYSTALLINE SOLIDS
- Real-time study ofa−Si:H∕c−Siheterointerface formation and epitaxial Si growth by spectroscopic ellipsometry, infrared spectroscopy, and second-harmonic generation
- (2008) J. J. H. Gielis et al. PHYSICAL REVIEW B
- Epitaxially grown emitters for thin film crystalline silicon solar cells
- (2008) K. Van Nieuwenhuysen et al. THIN SOLID FILMS
Add your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload NowAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started