Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications

标题
Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 2, Pages 021010
出版商
American Vacuum Society
发表日期
2011-02-01
DOI
10.1116/1.3551604

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