Metallic coatings of microelectromechanical structures at low temperatures: Stress, elasticity, and nonlinear dissipation

标题
Metallic coatings of microelectromechanical structures at low temperatures: Stress, elasticity, and nonlinear dissipation
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 11, Pages 114905
出版商
AIP Publishing
发表日期
2010-06-08
DOI
10.1063/1.3391901

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