First principles investigation of defect energy levels at semiconductor-oxide interfaces: Oxygen vacancies and hydrogen interstitials in the Si–SiO2–HfO2 stack

标题
First principles investigation of defect energy levels at semiconductor-oxide interfaces: Oxygen vacancies and hydrogen interstitials in the Si–SiO2–HfO2 stack
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 6, Pages 061603
出版商
AIP Publishing
发表日期
2009-03-17
DOI
10.1063/1.3055347

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