Fourier transform infrared spectroscopy of annealed silicon-rich silicon nitride thin films

标题
Fourier transform infrared spectroscopy of annealed silicon-rich silicon nitride thin films
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 10, Pages 104310
出版商
AIP Publishing
发表日期
2008-11-20
DOI
10.1063/1.3021158

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