The effects of annealing temperature on the photoluminescence from silicon nitride multilayer structures

标题
The effects of annealing temperature on the photoluminescence from silicon nitride multilayer structures
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 310, Issue 15, Pages 3680-3684
出版商
Elsevier BV
发表日期
2008-05-19
DOI
10.1016/j.jcrysgro.2008.05.018

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