4.6 Article

Epitaxial challenges of GaN on silicon

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MRS BULLETIN
卷 40, 期 5, 页码 412-417

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CAMBRIDGE UNIV PRESS
DOI: 10.1557/mrs.2015.96

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Recent successes with the fabrication of high-performance GaN-based heterostructures on silicon substrates have made this technology very promising. However, epitaxial growth of GaN on Si is challenging. This article presents some of the challenges of epitaxial growth of GaN-on-Si substrates focusing on basic aspects that are pertinent to consider for power electronics.

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