Deformation and removal characteristics in nanoscratching of 6H-SiC with Berkovich indenter

出版年份 2015 全文链接

标题

作者

关键词

6H-SiC, Nanoscratching, HPPT, DBT, Deformation.

出版物

Volume 31, Issue -, Pages 160-165

出版商

Elsevier BV

发表日期

2014-12-11

DOI

10.1016/j.mssp.2014.11.034

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