Structure and characteristics of reactive magnetron sputtered (CrTaTiVZr)N coatings

标题
Structure and characteristics of reactive magnetron sputtered (CrTaTiVZr)N coatings
作者
关键词
Multi-element nitride, Structure, XRD, TEM
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 39, Issue -, Pages 30-39
出版商
Elsevier BV
发表日期
2015-05-15
DOI
10.1016/j.mssp.2015.04.045

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