Flexible High-$\kappa$/Metal Gate Metal/Insulator/Metal Capacitors on Silicon (100) Fabric

标题
Flexible High-$\kappa$/Metal Gate Metal/Insulator/Metal Capacitors on Silicon (100) Fabric
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 60, Issue 10, Pages 3305-3309
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2013-08-27
DOI
10.1109/ted.2013.2278186

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