Deterministic assembly of releasable single crystal silicon-metal oxide field-effect devices formed from bulk wafers

标题
Deterministic assembly of releasable single crystal silicon-metal oxide field-effect devices formed from bulk wafers
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 18, Pages 182104
出版商
AIP Publishing
发表日期
2013-05-09
DOI
10.1063/1.4804139

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