Thermally Processed High-Mobility MOS Thin-Film Transistors on Transferable Single-Crystal Elastically Strain-Sharing Si/SiGe/Si Nanomembranes

标题
Thermally Processed High-Mobility MOS Thin-Film Transistors on Transferable Single-Crystal Elastically Strain-Sharing Si/SiGe/Si Nanomembranes
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 55, Issue 3, Pages 810-815
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2008-03-01
DOI
10.1109/ted.2007.914833

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