Effective Passivation of AlGaN/GaN HEMTs by ALD-Grown AlN Thin Film

标题
Effective Passivation of AlGaN/GaN HEMTs by ALD-Grown AlN Thin Film
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 33, Issue 4, Pages 516-518
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2012-02-23
DOI
10.1109/led.2012.2185921

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