Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

期刊名
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

ISSN / eISSN
2166-2746 / 2166-2754
研究方向

工程:电子与电气

纳米科技

物理:应用

CiteScore
3.00 查看趋势图
CiteScore 学科排名
类别 分区 排名
Engineering - Electrical and Electronic Engineering Q3 #389/738
Engineering - Instrumentation Q3 #74/136
Engineering - Materials Chemistry Q3 #172/306
Engineering - Surfaces, Coatings and Films Q3 #76/131
Engineering - Electronic, Optical and Magnetic Materials Q3 #162/271
Engineering - Process Chemistry and Technology Q3 #44/68
Web of Science 核心合集
Science Citation Index Expanded (SCIE) Social Sciences Citation Index (SSCI)
- -
出版商
AVS Science and Technology Society
Open Access
NO

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