Low Temperature Growth of Carbon Nanostructures by Radio Frequency‐Plasma Enhanced Chemical Vapor Deposition (Low Temperature Growth of Carbon Nanostructures by RF‐PECVD)

标题
Low Temperature Growth of Carbon Nanostructures by Radio Frequency‐Plasma Enhanced Chemical Vapor Deposition (Low Temperature Growth of Carbon Nanostructures by RF‐PECVD)
作者
关键词
-
出版物
FULLERENES NANOTUBES AND CARBON NANOSTRUCTURES
Volume 17, Issue 6, Pages 625-635
出版商
Informa UK Limited
发表日期
2009-11-15
DOI
10.1080/15363830903291408

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