4.1 Article

Enhanced electrical properties of AZO thin films grown on different substrates by using a facing-target sputtering system with hetero targets

期刊

JOURNAL OF THE KOREAN PHYSICAL SOCIETY
卷 67, 期 6, 页码 1007-1012

出版社

KOREAN PHYSICAL SOC
DOI: 10.3938/jkps.67.1007

关键词

AZO; FTS; Sputter system; Hetero targets; TCO

资金

  1. Business for Cooperative R&D between Industry, Academy, and Research Institute - Korea Small and Medium Business Administration [C0179561]
  2. Ministry of Education (MOE)
  3. National Research Foundation of Korea (NRF) through Human Resource Training Project for Regional Innovation [2015H1C1A1035619]
  4. Korea Evaluation Institute of Industrial Technology (KEIT) [C0179561] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
  5. National Research Foundation of Korea [2015H1C1A1035619] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

向作者/读者索取更多资源

Al-doped ZnO (AZO) films were deposited on glass, polyethylene naphthalate (PEN) and polyethylene terephthalate (PET) at room temperature by using conventional rf-magneton sputtering (CMS) and a facing-target sputtering (FTS) with hetero targets of Al2O3 and ZnO. Their structural, surface morphology, electrical and optical properties were characterized by using X-ray diffractometry (XRD), atomic force microscopy (AFM), Hall-effect measurement and ultravioletvisible spectrophotometry, respectively. The films exhibit highly c-axis preferred orientation and a closely packed nanocrystalline. Structure the FTS-films deposited on plastic substrate are found to receive much less stress due to bombardment of high-energy particles compress to the CMS-films deposited on plastic substrates, during the sputtering process, which can enhance the electrical properties and crystalline quality of the FTS-films compared with those of the CMS-films. The resistivities of the FTS-films are 6.50 x 10(-4) Omega center dot cm on glass, 7.0 x 10(-4) Omega center dot cm on PEN and 7.4 x 10(-4) Omega center dot cm on PET while the values for the CMS-films are 7.6 x 10(-4) Omega center dot cm on glass, 1.20 x 10(-3) Omega center dot cm on PEN and 1.58 x 10(-3) Omega center dot cm on PET.

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