期刊
FERROELECTRICS
卷 370, 期 -, 页码 85-93出版社
TAYLOR & FRANCIS LTD
DOI: 10.1080/00150190802384427
关键词
Piezoelectrics; PMN-PT; thin films; precursor chemistry
Thin films of lead magnesium niobate-lead titanate (PMN-PT) have been synthesized by a new and simple chemical solution deposition route, using Acetoin (3-Hydroxy 2-butanone) as chelating agent and methanol as solvent. The starting materials were Niobium ethoxide, Titanium butoxide, Magnesium ethoxide and Lead acetate. The films were deposited on Pt/Ti/SiO2/Si substrates by spin-coating. By a multilayer process, homogenous and crack-free films with thickness up to 1 m were obtained. The microstructure and surface morphology of the films were characterized by X-ray diffraction and atomic force microscopy (AFM) techniques. Films with a predominant perovskite phase and average grain size of 200 nm were obtained. The dielectric and ferroelectric properties are reported.
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