Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition

标题
Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition
作者
关键词
-
出版物
EUROPEAN PHYSICAL JOURNAL D
Volume 60, Issue 3, Pages 653-660
出版商
Springer Nature
发表日期
2010-09-28
DOI
10.1140/epjd/e2010-00245-x

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