期刊
EUROPEAN PHYSICAL JOURNAL B
卷 66, 期 4, 页码 427-431出版社
SPRINGER
DOI: 10.1140/epjb/e2008-00456-6
关键词
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By comparison of measured and ab initio calculated surface optical spectra we demonstrate that two main oxidation processes initially occur after dissociation of oxygen molecules, forming in both cases Si-O-Si entities: (i) breaking of Si dimers by incorporation of oxygen atoms; (ii) incorporation into the silicon backbonds. The kinetics up to half-monolayer coverage is determined, and explained in terms of Langmuir-like adsorption mechanisms with different probabilities.
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