Activation of Mg implanted in GaN by multicycle rapid thermal annealing

标题
Activation of Mg implanted in GaN by multicycle rapid thermal annealing
作者
关键词
-
出版物
ELECTRONICS LETTERS
Volume 50, Issue 3, Pages 197-198
出版商
Institution of Engineering and Technology (IET)
发表日期
2014-01-30
DOI
10.1049/el.2013.3214

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