Non-lithographically microfabricated capacitive pressure sensor for biomedical applications

出版年份 2011 全文链接

标题

Non-lithographically microfabricated capacitive pressure sensor for biomedical applications

作者

关键词

-

出版物

ELECTRONICS LETTERS

Volume 47, Issue 18, Pages 1015

出版商

Institution of Engineering and Technology (IET)

发表日期

2011-09-01

DOI

10.1049/el.2011.2230

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