Current collapse reduction in InAlN/GaN MOS HEMTs by in situ surface pre-treatment and atomic layer deposition of ZrO2 high-k gate dielectrics

标题
Current collapse reduction in InAlN/GaN MOS HEMTs by in situ surface pre-treatment and atomic layer deposition of ZrO2 high-k gate dielectrics
作者
关键词
-
出版物
ELECTRONICS LETTERS
Volume 45, Issue 11, Pages 570
出版商
Institution of Engineering and Technology (IET)
发表日期
2009-05-22
DOI
10.1049/el.2009.0728

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