Low-energy irradiation effects of gas cluster ion beams

标题
Low-energy irradiation effects of gas cluster ion beams
作者
关键词
-
出版物
Electronics and Communications in Japan
Volume 91, Issue 2, Pages 40-45
出版商
Wiley
发表日期
2008-09-19
DOI
10.1002/ecj.10031

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