Direct fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization

标题
Direct fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization
作者
关键词
-
出版物
DIAMOND AND RELATED MATERIALS
Volume 18, Issue 5-8, Pages 870-876
出版商
Elsevier BV
发表日期
2008-11-14
DOI
10.1016/j.diamond.2008.10.068

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