Chemical vapour deposition of amorphous Ru(P) thin films from Ru trialkylphosphite hydride complexes

标题
Chemical vapour deposition of amorphous Ru(P) thin films from Ru trialkylphosphite hydride complexes
作者
关键词
-
出版物
DALTON TRANSACTIONS
Volume 41, Issue 43, Pages 13496
出版商
Royal Society of Chemistry (RSC)
发表日期
2012-09-11
DOI
10.1039/c2dt31541f

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