A study of thin film encapsulation on polymer substrate using low temperature hybrid ZnO/Al2O3 layers atomic layer deposition

标题
A study of thin film encapsulation on polymer substrate using low temperature hybrid ZnO/Al2O3 layers atomic layer deposition
作者
关键词
-
出版物
CURRENT APPLIED PHYSICS
Volume 12, Issue -, Pages S19-S23
出版商
Elsevier BV
发表日期
2012-02-09
DOI
10.1016/j.cap.2012.02.012

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