期刊
CURRENT APPLIED PHYSICS
卷 12, 期 -, 页码 S104-S107出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.cap.2012.05.014
关键词
Rapid thermal annealing (RTA); Zinc tin oxide (ZTO); Ultraviolet photoelectron spectroscopy; Transmittance; Resistivity; Work function
We have investigated the rapid thermal annealing (RTA) effect on the electrical, optical, structural, and surface properties of zinc tin oxide (ZTO) films prepared by using a radio frequency (rf) magnetron sputtering at room temperature. The RTA of ZTO films up to 600 degrees C resulted in decrease of resistivity from 6.48 to 1.20 x 10(-2) Omega-cm and increase of work function from 3.81 eV to 4.68 eV. In particular, ultraviolet photoelectron spectroscopy examination showed that the work function of the ZTO film could be controlled by RTA process. However, optical transmittance, microstructure and surface morphology of the ZTO films didn't affected by RTA temperature up to 600 degrees C due to stable amorphous structure of the ZTO films. (c) 2012 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据