Epitaxial Growth ofm-Plane ZnO Thin Films on (101̅0) Sapphire Substrate by Atomic Layer Deposition with Interrupted Flow

标题
Epitaxial Growth ofm-Plane ZnO Thin Films on (101̅0) Sapphire Substrate by Atomic Layer Deposition with Interrupted Flow
作者
关键词
-
出版物
CRYSTAL GROWTH & DESIGN
Volume 10, Issue 4, Pages 1460-1463
出版商
American Chemical Society (ACS)
发表日期
2010-03-23
DOI
10.1021/cg9013043

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