Annealing Dependence of Solution-Processed Ultra-Thin ZrOx Films for Gate Dielectric Applications

标题
Annealing Dependence of Solution-Processed Ultra-Thin ZrOx Films for Gate Dielectric Applications
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 15, Issue 3, Pages 2185-2191
出版商
American Scientific Publishers
发表日期
2014-09-26
DOI
10.1166/jnn.2015.10228

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