A review of microelectromechanical systems for nanoscale mechanical characterization

标题
A review of microelectromechanical systems for nanoscale mechanical characterization
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 9, Pages 093001
出版商
IOP Publishing
发表日期
2015-08-20
DOI
10.1088/0960-1317/25/9/093001

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