A novel micro/nano fabrication process based on the combined use of dielectrophoresis, electroosmotic flow, and electrodeposition for surface patterning

标题
A novel micro/nano fabrication process based on the combined use of dielectrophoresis, electroosmotic flow, and electrodeposition for surface patterning
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 11, Pages 115007
出版商
IOP Publishing
发表日期
2015-09-29
DOI
10.1088/0960-1317/25/11/115007

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