Aerosol based direct-write micro-additive fabrication method for sub-mm 3D metal-dielectric structures

标题
Aerosol based direct-write micro-additive fabrication method for sub-mm 3D metal-dielectric structures
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 10, Pages 107002
出版商
IOP Publishing
发表日期
2015-09-21
DOI
10.1088/0960-1317/25/10/107002

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