Foil-to-Foil System Integration Through Capillary Self-Alignment Directed by Laser Patterning

标题
Foil-to-Foil System Integration Through Capillary Self-Alignment Directed by Laser Patterning
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 1, Pages 126-133
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2014-05-14
DOI
10.1109/jmems.2014.2321013

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