Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

标题
Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 4, Pages 831-838
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2014-09-24
DOI
10.1109/jmems.2014.2353855

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