Material Characterization and Transfer of Large-Area Ultra-Thin Polydimethylsiloxane Membranes

标题
Material Characterization and Transfer of Large-Area Ultra-Thin Polydimethylsiloxane Membranes
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 6, Pages 2170-2177
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2015-10-09
DOI
10.1109/jmems.2015.2480388

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