The effect of deposition velocity and cluster size on thin film growth by Cu cluster deposition

标题
The effect of deposition velocity and cluster size on thin film growth by Cu cluster deposition
作者
关键词
-
出版物
COMPUTATIONAL MATERIALS SCIENCE
Volume 65, Issue -, Pages 230-234
出版商
Elsevier BV
发表日期
2012-08-23
DOI
10.1016/j.commatsci.2012.07.001

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